Large-scale 2D electronics based on single-layer MoS[subscript 2] grown by chemical vapor deposition

Large-scale 2D electronics based on single-layer MoS[subscript 2] grown by chemical vapor deposition

2D nanoelectronics based on single-layer MoS[subscript 2] offers great advantages for both conventional and ubiquitous applications. This paper discusses the large-scale CVD growth of single-layer MoS[subscript 2] and fabrication of integrated devices and circuits for the first time. Fundamental bui...

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Bibliographic Details
Main Authors: Wang, H., Yu, L., Lee, Y.-H., Fang, W., Hsu, Allen Long, Chin, M., Dubey, Madan, Li, L.-J., Kong, Jing, Herring, Patrick Kenichi, Palacios, Tomas
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers (IEEE) 2014
Online Access:http://hdl.handle.net/1721.1/87106
https://orcid.org/0000-0002-3416-3962
https://orcid.org/0000-0001-5777-8364
https://orcid.org/0000-0003-0551-1208
https://orcid.org/0000-0002-2190-563X
Description
Summary:2D nanoelectronics based on single-layer MoS[subscript 2] offers great advantages for both conventional and ubiquitous applications. This paper discusses the large-scale CVD growth of single-layer MoS[subscript 2] and fabrication of integrated devices and circuits for the first time. Fundamental building blocks of digital electronics, such as inverters and NAND gates, are fabricated to demonstrate its capability for logic applications.

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