Large-scale 2D electronics based on single-layer MoS[subscript 2] grown by chemical vapor deposition
2D nanoelectronics based on single-layer MoS[subscript 2] offers great advantages for both conventional and ubiquitous applications. This paper discusses the large-scale CVD growth of single-layer MoS[subscript 2] and fabrication of integrated devices and circuits for the first time. Fundamental bui...
Main Authors: | Wang, H., Yu, L., Lee, Y.-H., Fang, W., Hsu, Allen Long, Chin, M., Dubey, Madan, Li, L.-J., Kong, Jing, Herring, Patrick Kenichi, Palacios, Tomas |
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Other Authors: | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
Format: | Article |
Language: | en_US |
Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2014
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Online Access: | http://hdl.handle.net/1721.1/87106 https://orcid.org/0000-0002-3416-3962 https://orcid.org/0000-0001-5777-8364 https://orcid.org/0000-0003-0551-1208 https://orcid.org/0000-0002-2190-563X |
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