Study of transport properties in graphene monolayer flakes on SiO[sub 2] substrates

We investigate the carrier mobility in monolayer and bilayer graphene with a top HfO2dielectric, as a function of the HfO2film thickness and temperature. The results show that the carrier mobility decreases during the deposition of the first 2–4 nm of top dielectric and remains constant for thicker...

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Bibliographic Details
Main Authors: Tirado, J. M., Nezich, Daniel A., Zhao, X., Chung, J. W., Kong, Jing, Palacios, Tomas
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: American Institute of Physics/American Vacuum Society 2014
Online Access:http://hdl.handle.net/1721.1/87120
https://orcid.org/0000-0003-0551-1208
https://orcid.org/0000-0002-2190-563X
Description
Summary:We investigate the carrier mobility in monolayer and bilayer graphene with a top HfO2dielectric, as a function of the HfO2film thickness and temperature. The results show that the carrier mobility decreases during the deposition of the first 2–4 nm of top dielectric and remains constant for thicker layers. The carrier mobility shows a relatively weak dependence on temperature indicating that phonon scattering does not play a dominant role in controlling the carrier mobility. The data strongly suggest that fixed charged impurities located in close proximity to the graphene are responsible for the mobility degradation.