The role of lattice excitation in Si etching

Thesis: S.M., Massachusetts Institute of Technology, Department of Chemistry, 2014.

Bibliographic Details
Main Author:	Blair, Michael Ryan
Other Authors:	Sylvia T. Ceyer.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Chemistry.
Online Access:	http://hdl.handle.net/1721.1/87472

Internet

http://hdl.handle.net/1721.1/87472