Single-layer graphene on silicon nitride micromembrane resonators
Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect...
| Main Authors: | , , , , , , , , , , , , , , , |
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| 其他作者: | |
| 格式: | 文件 |
| 语言: | en_US |
| 出版: |
American Institute of Physics
2014
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| 在线阅读: | http://hdl.handle.net/1721.1/87554 https://orcid.org/0000-0003-0551-1208 |