Single-layer graphene on silicon nitride micromembrane resonators

Single-layer graphene on silicon nitride micromembrane resonators

Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect...

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Bibliographic Details
Main Authors: Schmid, Silvan, Bagci, Tolga, Zeuthen, Emil, Taylor, Jacob M., Herring, Patrick Kenichi, Cassidy, Maja C., Marcus, Charles M., Guillermo Villanueva, Luis, Amato, Bartolo, Boisen, Anja, Cheol Shin, Yong, Kong, Jing, Sørensen, Anders S., Usami, Koji, Polzik, Eugene S., Shin, Yong Cheol
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: American Institute of Physics 2014
Online Access:http://hdl.handle.net/1721.1/87554
https://orcid.org/0000-0003-0551-1208

Internet

http://hdl.handle.net/1721.1/87554
https://orcid.org/0000-0003-0551-1208

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