Investigation of mechanisms and influencing processing factors on mobility enhancement in strained Si n-MOSFETs

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.

Bibliographic Details
Main Author:	Xia, Guangrui, 1976-
Other Authors:	Judy L. Hoyt.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/87898

Internet

http://hdl.handle.net/1721.1/87898