Piloting epitaxy with ellipsometry as an in-situ sensor technology

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.

Bibliographic Details
Main Author:	Warnick, Sean C. (Sean Charles)
Other Authors:	Munther A. Dahleh.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/87907

Internet

http://hdl.handle.net/1721.1/87907