Thermally-actuated piezoresistively-sensed mechanical silicon oscillator

Thesis: S.M., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2014.

Bibliographic Details
Main Author:	Sundaram, Subramanian, Ph. D. Massachusetts Institute of Technology
Other Authors:	Dana Weinstein.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/87951

Internet

http://hdl.handle.net/1721.1/87951