Vertical silicon nanowire arrays for gas sensing

Thesis: S.M., Massachusetts Institute of Technology, Department of Mechanical Engineering, February 2014.

Bibliographic Details
Main Author: Zhao, Hangbo
Other Authors: Carl V. Thompson and Evelyn Wang.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Online Access:http://hdl.handle.net/1721.1/87971