A high aspect-ratio silicon substrate-via technology and applications

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.

Bibliographic Details
Main Author:	Wu, Joyce H. (Joyce Hsia-Sing), 1974-
Other Authors:	Jesús A. del Alamo.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/8811

Internet

http://hdl.handle.net/1721.1/8811