Mechanics, mechanisms, and modeling of the chemical mechanical polishing process

Mechanics, mechanisms, and modeling of the chemical mechanical polishing process

Visa andra versioner (1)

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.

Bibliografiska uppgifter
Huvudupphovsman: Lai, Jiun-Yu
Övriga upphovsmän: Nannaji Saka and Jung-Hoon Chun.
Materialtyp: Lärdomsprov
Språk:eng
Publicerad: Massachusetts Institute of Technology 2005
Ämnen:
Mechanical Engineering.
Länkar:http://hdl.handle.net/1721.1/8860

Internet

http://hdl.handle.net/1721.1/8860

Liknande verk