Mechanics, mechanisms, and modeling of the chemical mechanical polishing process

Mechanics, mechanisms, and modeling of the chemical mechanical polishing process

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Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.

Bibliographic Details
Main Author: Lai, Jiun-Yu
Other Authors: Nannaji Saka and Jung-Hoon Chun.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/8860

Internet

http://hdl.handle.net/1721.1/8860

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