Automated lot dispatching in semiconductor fabrication

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management; in conjunction with the Leaders for Manufacturing Program at MIT, 2001.

Bibliographic Details
Main Author: Roznitsky, Yoel, 1974-
Other Authors: Sara L. Beckman, Donald B. Rosenfield and Stanley B. Gershwin.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Online Access:http://hdl.handle.net/1721.1/89317