Automated lot dispatching in semiconductor fabrication

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management; in conjunction with the Leaders for Manufacturing Program at MIT, 2001.

书目详细资料
主要作者: Roznitsky, Yoel, 1974-
其他作者: Sara L. Beckman, Donald B. Rosenfield and Stanley B. Gershwin.
格式: Thesis
语言:eng
出版: Massachusetts Institute of Technology 2014
主题:
在线阅读:http://hdl.handle.net/1721.1/89317