Image grating metrology using a Fresnel zone plate

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Bibliographic Details
Main Author:	Joo, Chulmin, 1976-
Other Authors:	Mark L. Schattenburg and George Barbastathis.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/89392

Internet

http://hdl.handle.net/1721.1/89392