Image grating metrology using a Fresnel zone plate
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/89392 |
| _version_ | 1811080773025923072 |
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| author | Joo, Chulmin, 1976- |
| author2 | Mark L. Schattenburg and George Barbastathis. |
| author_facet | Mark L. Schattenburg and George Barbastathis. Joo, Chulmin, 1976- |
| author_sort | Joo, Chulmin, 1976- |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003. |
| first_indexed | 2024-09-23T11:36:37Z |
| format | Thesis |
| id | mit-1721.1/89392 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T11:36:37Z |
| publishDate | 2014 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/893922019-04-12T14:01:58Z Image grating metrology using a Fresnel zone plate Joo, Chulmin, 1976- Mark L. Schattenburg and George Barbastathis. Massachusetts Institute of Technology. Department of Mechanical Engineering. Massachusetts Institute of Technology. Department of Mechanical Engineering. Mechanical Engineering. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003. Includes bibliographical references (p. 107-110). by Chulmin Joo. S.M. 2014-09-09T17:58:38Z 2014-09-09T17:58:38Z 2003 2003 Thesis http://hdl.handle.net/1721.1/89392 54536566 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 110 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering. Joo, Chulmin, 1976- Image grating metrology using a Fresnel zone plate |
| title | Image grating metrology using a Fresnel zone plate |
| title_full | Image grating metrology using a Fresnel zone plate |
| title_fullStr | Image grating metrology using a Fresnel zone plate |
| title_full_unstemmed | Image grating metrology using a Fresnel zone plate |
| title_short | Image grating metrology using a Fresnel zone plate |
| title_sort | image grating metrology using a fresnel zone plate |
| topic | Mechanical Engineering. |
| url | http://hdl.handle.net/1721.1/89392 |
| work_keys_str_mv | AT joochulmin1976 imagegratingmetrologyusingafresnelzoneplate |