A six-degree-of-freedom compliant micro-manipulator for silicon optical bench

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Bibliographic Details
Main Author:	Chen, Shih-Chi, 1977-
Other Authors:	Martin L. Culpepper.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/89396

Internet

http://hdl.handle.net/1721.1/89396