A six-degree-of-freedom compliant micro-manipulator for silicon optical bench
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
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| Formato: | Tese |
| Idioma: | eng |
| Publicado em: |
Massachusetts Institute of Technology
2014
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| Acesso em linha: | http://hdl.handle.net/1721.1/89396 |
| Resumo: | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003. |
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