A six-degree-of-freedom compliant micro-manipulator for silicon optical bench

A six-degree-of-freedom compliant micro-manipulator for silicon optical bench

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Bibliographic Details
Main Author: Chen, Shih-Chi, 1977-
Other Authors: Martin L. Culpepper.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/89396

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