Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient

Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient

A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a litho...

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Bibliographic Details
Main Authors: Singer, Jonathan P., Michel, Jurgen, Thomas, Edwin L., Lin, Pao Tai, Kooi, Steven E, Kimerling, Lionel C
Other Authors: Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies
Format: Article
Language:en_US
Published: Wiley Blackwell 2014
Online Access:http://hdl.handle.net/1721.1/89412
https://orcid.org/0000-0002-3913-6189

Internet

http://hdl.handle.net/1721.1/89412
https://orcid.org/0000-0002-3913-6189

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