Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient
A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a litho...
| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Wiley Blackwell
2014
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| Online Access: | http://hdl.handle.net/1721.1/89412 https://orcid.org/0000-0002-3913-6189 |
| _version_ | 1826199178027466752 |
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| author | Singer, Jonathan P. Michel, Jurgen Thomas, Edwin L. Lin, Pao Tai Kooi, Steven E Kimerling, Lionel C |
| author2 | Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies |
| author_facet | Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies Singer, Jonathan P. Michel, Jurgen Thomas, Edwin L. Lin, Pao Tai Kooi, Steven E Kimerling, Lionel C |
| author_sort | Singer, Jonathan P. |
| collection | MIT |
| description | A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free. |
| first_indexed | 2024-09-23T11:15:37Z |
| format | Article |
| id | mit-1721.1/89412 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T11:15:37Z |
| publishDate | 2014 |
| publisher | Wiley Blackwell |
| record_format | dspace |
| spelling | mit-1721.1/894122022-09-27T18:14:23Z Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient Singer, Jonathan P. Michel, Jurgen Thomas, Edwin L. Lin, Pao Tai Kooi, Steven E Kimerling, Lionel C Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies MIT Materials Research Laboratory Massachusetts Institute of Technology. Department of Materials Science and Engineering Singer, Jonathan P. Lin, Pao Tai Kooi, Steven Earl Kimerling, Lionel C. Michel, Jurgen A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free. United States. Army Research Office (Contract W911NF-07-D-0004) Semiconductor Research Corporation 2014-09-10T15:48:37Z 2014-09-10T15:48:37Z 2013-08 2013-06 Article http://purl.org/eprint/type/JournalArticle 09359648 1521-4095 http://hdl.handle.net/1721.1/89412 Singer, Jonathan P., Pao-Tai Lin, Steven E. Kooi, Lionel C. Kimerling, Jurgen Michel, and Edwin L. Thomas. “Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient.” Advanced Materials 25, no. 42 (August 21, 2013): 6100–6105. https://orcid.org/0000-0002-3913-6189 en_US http://dx.doi.org/10.1002/adma.201302777 Advanced Materials Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Wiley Blackwell Jon Singer |
| spellingShingle | Singer, Jonathan P. Michel, Jurgen Thomas, Edwin L. Lin, Pao Tai Kooi, Steven E Kimerling, Lionel C Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient |
| title | Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient |
| title_full | Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient |
| title_fullStr | Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient |
| title_full_unstemmed | Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient |
| title_short | Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient |
| title_sort | direct write thermocapillary dewetting of polymer thin films by a laser induced thermal gradient |
| url | http://hdl.handle.net/1721.1/89412 https://orcid.org/0000-0002-3913-6189 |
| work_keys_str_mv | AT singerjonathanp directwritethermocapillarydewettingofpolymerthinfilmsbyalaserinducedthermalgradient AT micheljurgen directwritethermocapillarydewettingofpolymerthinfilmsbyalaserinducedthermalgradient AT thomasedwinl directwritethermocapillarydewettingofpolymerthinfilmsbyalaserinducedthermalgradient AT linpaotai directwritethermocapillarydewettingofpolymerthinfilmsbyalaserinducedthermalgradient AT kooistevene directwritethermocapillarydewettingofpolymerthinfilmsbyalaserinducedthermalgradient AT kimerlinglionelc directwritethermocapillarydewettingofpolymerthinfilmsbyalaserinducedthermalgradient |