Particle generation in a chemical vapor deposition/plasma-enhanced chemical vapor deposition interlayer dielectric tool

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.

Bibliographic Details
Main Author:	Haberer, Elaine D. (Elaine Denise), 1975-
Other Authors:	L.C. Kimerling.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/8992

Internet

http://hdl.handle.net/1721.1/8992