Spoked-ring microcavities: enabling seamless integration of nanophotonics in unmodified advanced CMOS microelectronics chips

Spoked-ring microcavities: enabling seamless integration of nanophotonics in unmodified advanced CMOS microelectronics chips

We present the spoked-ring microcavity, a nanophotonic building block enabling energy-efficient, active photonics in unmodified, advanced CMOS microelectronics processes. The cavity is realized in the IBM 45nm SOI CMOS process – the same process used to make many commercially available microprocesso...

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Bibliographic Details
Main Authors: Wade, Mark T., Shainline, Jeffrey M., Orcutt, Jason Scott, Ram, Rajeev J., Stojanovic, Vladimir, Popovic, Milos A.
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Society of Photo-Optical Instrumentation Engineers (SPIE) 2014
Online Access:http://hdl.handle.net/1721.1/90573
https://orcid.org/0000-0003-0420-2235

Internet

http://hdl.handle.net/1721.1/90573
https://orcid.org/0000-0003-0420-2235

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