Spoked-ring microcavities: enabling seamless integration of nanophotonics in unmodified advanced CMOS microelectronics chips
We present the spoked-ring microcavity, a nanophotonic building block enabling energy-efficient, active photonics in unmodified, advanced CMOS microelectronics processes. The cavity is realized in the IBM 45nm SOI CMOS process – the same process used to make many commercially available microprocesso...
| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Society of Photo-Optical Instrumentation Engineers (SPIE)
2014
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| Online Access: | http://hdl.handle.net/1721.1/90573 https://orcid.org/0000-0003-0420-2235 |