2DEG electrodes for piezoelectric transduction of AlGaN/GaN MEMS resonators

A 2D electron gas (2DEG) interdigitated transducer (IDT) in Gallium Nitride (GaN) resonators is introduced and demonstrated. This metal-free transduction does not suffer from the loss mechanisms associated with more commonly used metal electrodes. As a result, this transducer can be used for both th...

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Bibliographic Details
Main Authors: Weinstein, Dana, Popa, Laura Cornelia
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers (IEEE) 2014
Online Access:http://hdl.handle.net/1721.1/91022