High mobility In[subscript 0.53]Ga[subscript 0.47]As quantum-well metal oxide semiconductor field effect transistor structures

In this paper, we demonstrate high electron mobility In[subscript 0.53]Ga[subscript 0.47]As quantum-well metal oxide semiconductor field effect transistor(MOSFET)structures. The Al[subscript 2]O[subscript 3] (gate dielectric)/In[subscript 0.53]Ga[subscript 0.47]As-In[subscript 0.52]Al[subscript 0.48...

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Bibliographic Details
Main Authors: Yang, Li, Cheng, Cheng-Wei, Bulsara, Mayank, Fitzgerald, Eugene A.
Other Authors: MIT Materials Research Laboratory
Format: Article
Language:en_US
Published: American Institute of Physics (AIP) 2014
Online Access:http://hdl.handle.net/1721.1/91922
https://orcid.org/0000-0002-1891-1959