Spatial variation decomposition via sparse regression
In this paper, we briefly discuss the recent development of a novel sparse regression technique that aims to accurately decompose process variation into two different components: (1) spatially correlated variation, and (2) uncorrelated random variation. Such variation decomposition is important to i...
| Main Authors: | , , , , , , |
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| 其他作者: | |
| 格式: | 文件 |
| 语言: | en_US |
| 出版: |
Institute of Electrical and Electronics Engineers (IEEE)
2014
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| 在线阅读: | http://hdl.handle.net/1721.1/92427 https://orcid.org/0000-0002-0417-445X |