Macro-scale investigation of high speed gas bearings for MEMS devices

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2000.

Bibliographic Details
Main Author:	Orr, Doyle Jay, 1969-
Other Authors:	Kenneth S. Breuer.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Aeronautics and Astronautics.
Online Access:	http://hdl.handle.net/1721.1/9268

Internet

http://hdl.handle.net/1721.1/9268