Design rules for self-assembled block copolymer patterns using tiled templates
Directed self-assembly of block copolymers has been used for fabricating various nanoscale patterns, ranging from periodic lines to simple bends. However, assemblies of dense bends, junctions and line segments in a single pattern have not been achieved by using sparse templates, because no systemati...
| Main Authors: | , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Nature Publishing Group
2015
|
| Online Access: | http://hdl.handle.net/1721.1/92710 https://orcid.org/0000-0003-2262-1249 https://orcid.org/0000-0001-7453-9031 https://orcid.org/0000-0001-5554-1283 https://orcid.org/0000-0003-2055-4900 |