Magnetic bearing stages for electron beam lithography

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Sonraí bibleagrafaíochta
Príomhchruthaitheoir:	Konkola, Paul Thomas, 1973-
Rannpháirtithe:	David L. Trumper.
Formáid:	Tráchtas
Teanga:	eng
Foilsithe / Cruthaithe:	Massachusetts Institute of Technology 2005
Ábhair:	Mechanical Engineering.
Rochtain ar líne:	http://hdl.handle.net/1721.1/9315

Ar líne

http://hdl.handle.net/1721.1/9315