Magnetic bearing stages for electron beam lithography

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Bibliographic Details
Main Author:	Konkola, Paul Thomas, 1973-
Other Authors:	David L. Trumper.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/9315

Internet

http://hdl.handle.net/1721.1/9315