Magnetic bearing stages for electron beam lithography

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Sonraí bibleagrafaíochta
Príomhchruthaitheoir: Konkola, Paul Thomas, 1973-
Rannpháirtithe: David L. Trumper.
Formáid: Tráchtas
Teanga:eng
Foilsithe / Cruthaithe: Massachusetts Institute of Technology 2005
Ábhair:
Rochtain ar líne:http://hdl.handle.net/1721.1/9315