Design, fabrication, and characterization of a compact deep reactive ion etching system for MEMS processing

Thesis: S.M., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2014.

Bibliographic Details
Main Authors:	Gould, Parker Andrew, Hsing, Mitchell David
Other Authors:	Martin A. Schmidt.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2015
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/93835

Internet

http://hdl.handle.net/1721.1/93835