Electrical study of molybdenum in silicon and fluorinated SiO₂ for interlayer dielectrics

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.

Bibliographic Details
Main Author:	Cagas, Jean (Cagas Quijano, Jean Allison), 1977-
Other Authors:	Lionel C. Kimerling.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/9556

Internet

http://hdl.handle.net/1721.1/9556