Analysis and reduction of variability in scanning electron microscopy measurements of critical dimensions

Analysis and reduction of variability in scanning electron microscopy measurements of critical dimensions

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management, 1998.

Bibliographic Details
Main Author: Cortesi, Elisabetta, 1966-
Other Authors: Lionel C. Kimerling and Lawrence M. Wein.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Materials Science and Engineering
Sloan School of Management
Online Access:http://hdl.handle.net/1721.1/9579

Internet

http://hdl.handle.net/1721.1/9579

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