Zone plate array lithography in the deep UV

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Detaylı Bibliyografya
Yazar:	Djomehri, Ihsan Jahed, 1976-
Diğer Yazarlar:	Henry I. Smith.
Materyal Türü:	Tez
Dil:	eng
Baskı/Yayın Bilgisi:	Massachusetts Institute of Technology 2005
Konular:	Electrical Engineering and Computer Science
Online Erişim:	http://hdl.handle.net/1721.1/9626

Internet

http://hdl.handle.net/1721.1/9626