Positioning, control, and dynamics of electrostatic actuators for use in optical and RF systems
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
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| 格式: | Thesis |
| 语言: | eng |
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Massachusetts Institute of Technology
2005
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| 在线阅读: | http://hdl.handle.net/1721.1/9633 |