Positioning, control, and dynamics of electrostatic actuators for use in optical and RF systems

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author:	Hung, Elmer S
Other Authors:	Stephen D. Senturia.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/9633

Internet

http://hdl.handle.net/1721.1/9633