Positioning, control, and dynamics of electrostatic actuators for use in optical and RF systems

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Detalhes bibliográficos
Autor principal:	Hung, Elmer S
Outros Autores:	Stephen D. Senturia.
Formato:	Tese
Idioma:	eng
Publicado em:	Massachusetts Institute of Technology 2005
Assuntos:	Electrical Engineering and Computer Science
Acesso em linha:	http://hdl.handle.net/1721.1/9633

Internet

http://hdl.handle.net/1721.1/9633