Modeling of chemical mechanical polishing for dielectric planarization

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 1999.

Bibliographic Details
Main Author:	Ouma, Dennis Okumu
Other Authors:	Duane S. Boning and James E. Chung.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/9704

Internet

http://hdl.handle.net/1721.1/9704