DC magnetron reactive sputtering of low stress AlN piezoelectric thin films for MEMS application

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.

Bibliographic Details
Main Author:	Hsieh, Peter Y. (Peter Yaw-ming), 1975-
Other Authors:	Rafael Reif.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/9736

Internet

http://hdl.handle.net/1721.1/9736