DC magnetron reactive sputtering of low stress AlN piezoelectric thin films for MEMS application

DC magnetron reactive sputtering of low stress AlN piezoelectric thin films for MEMS application

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.

Bibliographic Details
Main Author: Hsieh, Peter Y. (Peter Yaw-ming), 1975-
Other Authors: Rafael Reif.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Materials Science and Engineering
Online Access:http://hdl.handle.net/1721.1/9736

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