Precision six degrees of freedom magnetically-levitated photolithography stage

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

书目详细资料
主要作者:	Williams, Mark E. (Mark Edd)
其他作者:	David L. Trumper.
格式:	Thesis
语言:	eng
出版:	Massachusetts Institute of Technology 2005
主题:	Mechanical Engineering
在线阅读:	http://hdl.handle.net/1721.1/9850

因特网

http://hdl.handle.net/1721.1/9850