Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers
An analytical Mason equivalent circuit is derived for a circular, clamped plate piezoelectric micromachined ultrasonic transducer (pMUT) design in 31 mode, considering an arbitrary electrode configuration at any axisymmetric vibration mode. The explicit definition of lumped parameters based entirely...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2015
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| Online Access: | http://hdl.handle.net/1721.1/98507 https://orcid.org/0000-0002-3125-3268 https://orcid.org/0000-0001-5212-6762 |