Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers
An analytical Mason equivalent circuit is derived for a circular, clamped plate piezoelectric micromachined ultrasonic transducer (pMUT) design in 31 mode, considering an arbitrary electrode configuration at any axisymmetric vibration mode. The explicit definition of lumped parameters based entirely...
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| Format: | Article |
| Language: | en_US |
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Institute of Electrical and Electronics Engineers (IEEE)
2015
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| Online Access: | http://hdl.handle.net/1721.1/98507 https://orcid.org/0000-0002-3125-3268 https://orcid.org/0000-0001-5212-6762 |
| _version_ | 1811076759158784000 |
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| author | Kim, Sang-Gook Smyth, Katherine M. |
| author2 | Massachusetts Institute of Technology. Department of Mechanical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Mechanical Engineering Kim, Sang-Gook Smyth, Katherine M. |
| author_sort | Kim, Sang-Gook |
| collection | MIT |
| description | An analytical Mason equivalent circuit is derived for a circular, clamped plate piezoelectric micromachined ultrasonic transducer (pMUT) design in 31 mode, considering an arbitrary electrode configuration at any axisymmetric vibration mode. The explicit definition of lumped parameters based entirely on geometry, material properties, and defined constants enables straightforward and wide-ranging model implementation for future pMUT design and optimization. Beyond pMUTs, the acoustic impedance model is developed for universal application to any clamped, circular plate system, and operating regimes including relevant simplifications are identified via the wave number-radius product ka. For the single-electrode fundamental vibration mode case, sol-gel Pb(Zr[subscript 0.52])Ti[subscript 0.48]O[subscript 3] (PZT) pMUT cells are microfabricated with varying electrode size to confirm the derived circuit model with electrical impedance measurements. For the first time, experimental and finite element simulation results are successfully applied to validate extensive electrical, mechanical, and acoustic analytical modeling of a pMUT cell for wide-ranging applications including medical ultrasound, nondestructive testing, and range finding. |
| first_indexed | 2024-09-23T10:27:01Z |
| format | Article |
| id | mit-1721.1/98507 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T10:27:01Z |
| publishDate | 2015 |
| publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| record_format | dspace |
| spelling | mit-1721.1/985072022-09-26T17:58:25Z Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers Kim, Sang-Gook Smyth, Katherine M. Massachusetts Institute of Technology. Department of Mechanical Engineering Kim, Sang-Gook Smyth, Katherine M. Kim, Sang-Gook An analytical Mason equivalent circuit is derived for a circular, clamped plate piezoelectric micromachined ultrasonic transducer (pMUT) design in 31 mode, considering an arbitrary electrode configuration at any axisymmetric vibration mode. The explicit definition of lumped parameters based entirely on geometry, material properties, and defined constants enables straightforward and wide-ranging model implementation for future pMUT design and optimization. Beyond pMUTs, the acoustic impedance model is developed for universal application to any clamped, circular plate system, and operating regimes including relevant simplifications are identified via the wave number-radius product ka. For the single-electrode fundamental vibration mode case, sol-gel Pb(Zr[subscript 0.52])Ti[subscript 0.48]O[subscript 3] (PZT) pMUT cells are microfabricated with varying electrode size to confirm the derived circuit model with electrical impedance measurements. For the first time, experimental and finite element simulation results are successfully applied to validate extensive electrical, mechanical, and acoustic analytical modeling of a pMUT cell for wide-ranging applications including medical ultrasound, nondestructive testing, and range finding. Masdar Institute of Science and Technology (Massachusetts Institute of Technology Cooperative Agreement Grant 6923443) National Science Foundation (U.S.). Graduate Research Fellowship 2015-09-15T16:39:45Z 2015-09-15T16:39:45Z 2015-04 2014-09 Article http://purl.org/eprint/type/JournalArticle 0885-3010 http://hdl.handle.net/1721.1/98507 Smyth, Katherine, and Sang-Gook Kim. “Experiment and Simulation Validated Analytical Equivalent Circuit Model for Piezoelectric Micromachined Ultrasonic Transducers.” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 62, no. 4 (April 2015): 744–765. https://orcid.org/0000-0002-3125-3268 https://orcid.org/0000-0001-5212-6762 en_US http://dx.doi.org/10.1109/TUFFC.2014.006725 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf Institute of Electrical and Electronics Engineers (IEEE) Kim |
| spellingShingle | Kim, Sang-Gook Smyth, Katherine M. Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers |
| title | Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers |
| title_full | Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers |
| title_fullStr | Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers |
| title_full_unstemmed | Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers |
| title_short | Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers |
| title_sort | experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers |
| url | http://hdl.handle.net/1721.1/98507 https://orcid.org/0000-0002-3125-3268 https://orcid.org/0000-0001-5212-6762 |
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