Macro-modeling of micro-electrical-mechanical system devices

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Bibliographic Details
Main Author:	Wang, Qiutao.
Other Authors:	Jacob White.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/9917

Internet

http://hdl.handle.net/1721.1/9917