Macro-modeling of micro-electrical-mechanical system devices
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9917 |
| _version_ | 1826209184517980160 |
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| author | Wang, Qiutao. |
| author2 | Jacob White. |
| author_facet | Jacob White. Wang, Qiutao. |
| author_sort | Wang, Qiutao. |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. |
| first_indexed | 2024-09-23T14:18:32Z |
| format | Thesis |
| id | mit-1721.1/9917 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T14:18:32Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/99172019-04-12T09:36:06Z Macro-modeling of micro-electrical-mechanical system devices Wang, Qiutao. Jacob White. Massachusetts Institute of Technology. Dept. of Mechanical Engineering Mechanical Engineering Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. Includes bibliographical references (leaves 48-50). by Qiutao Wang. S.M. 2005-08-19T16:52:12Z 2005-08-19T16:52:12Z 1998 1998 Thesis http://hdl.handle.net/1721.1/9917 41995645 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 50 leaves 2847238 bytes 2846996 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering Wang, Qiutao. Macro-modeling of micro-electrical-mechanical system devices |
| title | Macro-modeling of micro-electrical-mechanical system devices |
| title_full | Macro-modeling of micro-electrical-mechanical system devices |
| title_fullStr | Macro-modeling of micro-electrical-mechanical system devices |
| title_full_unstemmed | Macro-modeling of micro-electrical-mechanical system devices |
| title_short | Macro-modeling of micro-electrical-mechanical system devices |
| title_sort | macro modeling of micro electrical mechanical system devices |
| topic | Mechanical Engineering |
| url | http://hdl.handle.net/1721.1/9917 |
| work_keys_str_mv | AT wangqiutao macromodelingofmicroelectricalmechanicalsystemdevices |