Macro-modeling of micro-electrical-mechanical system devices

Macro-modeling of micro-electrical-mechanical system devices

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Bibliographic Details
Main Author: Wang, Qiutao.
Other Authors: Jacob White.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/9917

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