Digital holography for MEMS application
Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.
| Main Authors: | , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/101298 http://hdl.handle.net/10220/7116 http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2 |