Digital holography for MEMS application
Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.
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| Format: | Conference Paper |
| Language: | English |
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2011
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| Online Access: | https://hdl.handle.net/10356/101298 http://hdl.handle.net/10220/7116 http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2 |
| _version_ | 1811688185924681728 |
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| author | Anand, Asundi Singh, Vijay Raj |
| author2 | School of Mechanical and Aerospace Engineering |
| author_facet | School of Mechanical and Aerospace Engineering Anand, Asundi Singh, Vijay Raj |
| author_sort | Anand, Asundi |
| collection | NTU |
| description | Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented. |
| first_indexed | 2024-10-01T05:28:12Z |
| format | Conference Paper |
| id | ntu-10356/101298 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T05:28:12Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | ntu-10356/1012982023-03-04T17:07:36Z Digital holography for MEMS application Anand, Asundi Singh, Vijay Raj School of Mechanical and Aerospace Engineering Digital Holography and Three-Dimensional Imaging (2009 : Vancouver, Canada) DRNTU::Science::Physics::Optics and light Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented. Published version 2011-09-29T04:16:20Z 2019-12-06T20:36:20Z 2011-09-29T04:16:20Z 2019-12-06T20:36:20Z 2009 2009 Conference Paper Anand, A. & Singh, V. R. (2009). Digital Holography for MEMS Application. Digital Holography and Three-Dimensional Imaging (DH) (2009:Vancouver). https://hdl.handle.net/10356/101298 http://hdl.handle.net/10220/7116 http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2 143358 en © 2009 Optical Society of America. This paper was published in OSA Technical Digest and is made available as an electronic reprint (preprint) with permission of Optical Society of America. The paper can be found at URL: http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. 3 p. application/pdf |
| spellingShingle | DRNTU::Science::Physics::Optics and light Anand, Asundi Singh, Vijay Raj Digital holography for MEMS application |
| title | Digital holography for MEMS application |
| title_full | Digital holography for MEMS application |
| title_fullStr | Digital holography for MEMS application |
| title_full_unstemmed | Digital holography for MEMS application |
| title_short | Digital holography for MEMS application |
| title_sort | digital holography for mems application |
| topic | DRNTU::Science::Physics::Optics and light |
| url | https://hdl.handle.net/10356/101298 http://hdl.handle.net/10220/7116 http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2 |
| work_keys_str_mv | AT anandasundi digitalholographyformemsapplication AT singhvijayraj digitalholographyformemsapplication |