A ZnO microcantilever for high-frequency nanopositioning : modeling, fabrication and characterization

A ZnO microcantilever for high-frequency nanopositioning : modeling, fabrication and characterization

Previous studies on zinc oxide (ZnO) microcantilevers have been focused on applications in the atomic force microscopy (AFM). Characteristics of ZnO microcantilever actuators were not thoroughly investigated in those studies. This paper reports modeling, fabrication and characterization of a piezoel...

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Bibliographic Details
Main Authors: Yuan, Yanhui, Du, Hejun, Wang, Peihong, Chow, Kun Shyong, Zhang, Mingsheng, Yu, Shengkai, Liu, Bo
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:https://hdl.handle.net/10356/101399
http://hdl.handle.net/10220/18362

Internet

https://hdl.handle.net/10356/101399
http://hdl.handle.net/10220/18362

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