Uncooled resonant infrared detector based on aluminum nitride piezoelectric film through charge generations and lattice absorptions

This Letter demonstrates an aluminum nitride (AlN) based uncooled resonant infrared (IR) detector utilizing the photo-sensitive and piezoelectric properties of polycrystalline AlN. The AlN Lamb wave mode resonator is found responsive to IR illuminations by showing a decrease in the S 21 magnitude in...

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Bibliographic Details
Main Authors: Tan, Chuan Seng, Kropelnicki, P., Zhu, Y., Randles, A. B., Gu, Y. A., Leong, K. C., Ang, Wan Chia
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2014
Subjects:
Online Access:https://hdl.handle.net/10356/101698
http://hdl.handle.net/10220/19754