Automatic hysteresis modeling of piezoelectric micromanipulator in vision-guided micromanipulation systems
Conventional hysteresis modeling of piezoelectric actuators using interferometers or capacitive sensors is often performed off-line. However, the hysteresis of the piezoelectric actuator changes as the load acting on it or the driving frequency of the input signal alters, demanding that the hysteres...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/101993 http://hdl.handle.net/10220/16507 |